Laboratory Profilo

Lab Facilities

Our lab is well equipped with a variety of tools for the growth and characterization of ferroic thin films, heterostructures, and micro/nano devices.

Film Preparation Equipment-薄膜制备设备

Magnetron Sputtering System-磁控溅射系统

Atomic layer deposition (ALD)-原子层沉积系统

Pulsed Laser Deposition(PLD)-激光脉冲沉积系统

Test Equipment-测试设备


Vibrating Sample Magnetometer(VSM)-振动样品磁强计

Electron Paramagnetic Resonance System(EPR)-电子顺磁共振系统

Broadband Ferromagnetic Resonance System-宽频铁磁共振系统

Vector Magnetic Field Probe System-矢量磁场探针系统

Variable Temperature Probe System-变温探针系统

Intelligent Inductance Measurement System(2MHz)-智能电感测试系统(2MHz)

Intelligent Inductance Measurement System(110MHz)-智能电感测试系统(110MHz)

Atomic Force Microscope(AFM)-原子力显微镜


Device Construction Equipment-器件构造设备

Mask Aligner-光刻机

Ion Beam Etching system-离子束刻蚀系统

Chemistry preparation room-化学制备间